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TEM Technical Capabilities

Signal Detected:

Transmitted electrons, scattered electrons, x-rays

Elements Detected:

EDS: B-U

Detection Limits:

~1 nm sized particles; otherwise 1%

Depth Resolution:

Samples must be thinned to be analyzed and are thinned down to 30-1000 nm, depending on application and tool.

Imaging/Mapping:

Ultimate Lateral Resolution:

<0.5 nm