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SIMS Theory: Relative Sensitivity Factors
Quantitative analysis by SIMS uses relative sensitivity factors defined according to the following equation.
The major (or matrix) element is usually chosen as the reference. Substituting M (matrix) for R (reference) and rearranging gives the following equation.
In trace element analysis, we can assume that the matrix elemental concentration remains constant. The matrix concentration can be combined with the elemental RSF to give a more convenient constant, RSF.
This RSF is a function of the element of interest and the sample matrix.
Note that RSF and CE have the same concentration units. This is the most common form of the RSF equation.
