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SIMS Theory: RSF Tables
The following tables of RSF values (from R.G. Wilson, Int. J. Mass
Spectrometry. Ion Proc., 143, 43, 1995) show how sensitivity
depends on the element of interest. Low RSFs mean high sensitivity. Note
that modest concentrations of high sensitivity elements can saturate electron
multiplier ion detectors.
The following RSFs have been measured for oxygen primary ion bombardment, positive secondary ions, and a silicon matrix.
These RSFs have been measured for cesium primary ion bombardment, negative secondary ions, and a silicon matrix.
